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Intelligent ECD Fluoride Monitoring System Helps Semiconductor Fabrication


Plant engineers and technicians in manufacturing plants with corrosive processes that rely on hydrofluoric (HF) acid will find the S80-T80 Fluoride Monitoring System from Electro-Chemical Devices supports efficient wastewater treatment processes to reduce consumable costs and ensure discharge effluent fluoride levels are compliant with local, state and federal regulations.

HF acid is a water based compound that is commonly used in a variety of industrial applications that include: semiconductor chip fabrication, electronics assemblies, chemical refining as a catalyst, metal plating, glass etching and various cleaning processes.  While HF acid is technically considered a weak acid, it is a hazardous material with the potential to harm employees and the environment when improperly used or treated prior to plant discharge.

Typical HF acid wastewater treatment systems inject a milk of lime solution Ca(OH)2 into the process water, which precipitates the fluorides out as calcium fluoride (CAF) salt. In order to ensure correct dosing with the milk of lime solution, the incoming and outgoing fluoride levels must be accurately monitored and compared in order to prevent either wasteful over-dosing or insufficient treatment of the effluent prior to discharge.

  • The ECD S80-T80 Fluoride Monitoring System provides these comparative incoming and out going measurements. ECD's monitoring system features an S80 pIon Fluoride Sensor, an S80 pH Sensor and a dual-channel T80 Transmitter. This ECD solution helps plants achieve a more cost-effective fluoride removal water treatment system, which doesn't over use consumable chemicals while also ensuring the wastewater is treated sufficiently to meet regulatory requirements prior to effluent discharge.
  • The S80 Fluoride Sensor features a pIon electrode cartridge that measures the activity of "free" fluoride ions in solution concentrations from 0.02 to 2,000 ppm over a pH range from 5-8 pH. It operates over a wide temperature range of 0 to 80ºC.
  •  The S80 Sensors come in immersion or insertion package configurations that are designed with a 0.75-inch MNPT compression fitting as the process connection. This design employs a variable insertion length to accommodate installation in pipe tees, flow cells or through tank walls. The retractable configuration is designed with a 1-inch MNPT ball valve, a 1-x-0.75 inch reducer and a 0.75 inch MNPT compression fitting to provide the process connection. 

The intelligent T80 Transmitter provides dual-channel comparison of measurements or inputs, which can improve the accuracy of fluoride measurement. For example, fluoride ions are affected by changes in the pH of a solution. The correct measurement of fluoride levels is only possible if pH is also measured and appropriate compensation algorithms are processed. The S80 pH Sensor and the dual-channel T80 Transmitter easily handles these types of comparative measurements.

The S80 Sensors and T80 Transmitter come pre-calibrated from the factory with easy plug-n-play set-up. The sensors feature easy-to-replace long-life cartridges, which eliminate consumable, expensive re-agents for lower cost maintenance to reduce plant and process operating costs.

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