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Brooks Instrument Announce New Vaporization Product

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Brooks Instrument will be exhibiting at SEMICON West 2017 with a new vaporization product, mass flow controllers with high-speed EtherCAT, and a broad range of other mass flow meters, controllers and capacitance manometers for semiconductor manufacturing.

The show runs July 11-13 at the Moscone Center in San Francisco. Brooks Instrument will be located in the West Hall at booth 7723.
With more than 70 years of history in new technology developments, Brooks Instrument is focused on improving the precision and performance of mass flow, pressure and vacuum technologies to help enable advanced semiconductor manufacturing.

A world leader in advanced flow, pressure, vacuum and vapor delivery solutions, Brooks Instrument will showcase key components in its portfolio designed to meet critical gas chemistry control challenges and improve process yields for 10nm and beyond nodes. This includes the new VDM300 vapor delivery module (VDM) as well as the company’s proven GF100 Series mass flow controllers (MFC) with high-speed EtherCAT connectivity.

VDM300 Vapor Delivery Module: The self-contained VDM delivers precise amounts of ultra-high-purity deionized water (DIW) vapor to help ensure accurate and repeatable processing for functions such as plasma etching and photoresist stripping. Using proven vapor-draw vaporization technology and reliable component designs from previous Brooks Instrument vaporizers, the VDM300 features an improved graphical user interface and firmware.

Full-scale flow capacity is up to 3,000 standard cubic centimeters per minute (sccm), with a better control turndown ratio of 20:1. Flow accuracy is ±1.0 percent of set point at 10-100 percent full-scale, while repeatability is less than ±0.2 percent of full-scale. In addition, the flow rate is independent of DIW inlet pressure fluctuations.


With its optional EtherCAT interface, the VDM300 joins the Brooks Instrument line of EtherCAT-enabled products, which also includes the company’s proven GF100 Series MFCs. The VDM300 uses the same signal processing and calibration techniques as the GF100 Series.


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