SPTS enables next generation MEMS development
SPTS Technologies, an Orbotech company and a supplier of advanced wafer processing solutions for the global semiconductor and related industries, HAS announced that Shanghai Industrial µTechnology Research Institute (SITRI), an international innovation center established to accelerate the development and commercialization of "More than Moore" to power the Internet of Things, has selected SPTS's Omega Rapier plasma etch solution for its 8-inch MEMS fabrication facility in Shanghai, China. SITRI will use SPTS's industry leading Rapier deep reactive ion etch (DRIE) module for a range of key silicon etch processes including through-silicon-vias (TSV), for the development and pilot production of next generation MEMS and sensors. The selection process involved bench-marking the Rapier's capabilities against a range of other vendors' deep silicon etch product lines.
Kevin Crofton, Corporate Executive Vice President at Orbotech and President of SPTS Technologies, commented: "The MEMS industry is undergoing device-shrink trends similar to the overall semiconductor industry, where designers and manufacturers are continually challenged to deliver more functionality with lower power consumption and at lower cost. This trend is being fueled by the growth of smarter, more connected and wearable electronics as we move closer to the realization of the Internet of Things."
Mr Crofton added, "SPTS has worked closely with the world's leading MEMS manufacturers, foundries and research institutes for more than two decades, which has allowed us to develop advanced MEMS and sensors processing solutions and establish an installed base of over 1200 DRIE modules across the world. This vast experience will allow SITRI to provide high throughput silicon etch solutions and play a key enabling role in the innovation and commercialization of next generation MEMS devices."
To learn more about SPTS's full range of industry leading etch and deposition process solutions for MEMS manufacturing, visit SPTS Technologies at MEMS 2018, Booth No.24, 21st "“ 25th January, in Belfast, Ireland and at SEMICON Korea, Booth No. D636, 31st Jan "“ 2nd Feb, at the COEX Exhibition Center, Seoul, So. Korea.
