Info
Info

EVG Secures Lithography Order From VTT

News

VTT to use new EVG120 system for research into 'More than Moore' technology including MEMS, optoelectronics, photonics and compound semiconductors.

EV Group (EVG), a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and semiconductors, has received an order for its EVG120 automated resist processing system from VTT Technical Research Centre of Finland (VTT).

An existing customer of EVG's wafer bonding and alignment systems, VTT is among the first to place an order for the newest version of the EVG120 system, which has been enhanced to provide greater reliability, throughput and process performance compared to the previous-generation platform.

VTT will use the new EVG120 system to increase capacity for supporting parallel R&D projects involving new and different coating materials, as well as to enable new research applications in "More than Moore" technology areas such as MEMS, optoelectronics, photonics and compound semiconductors.

"Lithography plays a vital role in the production process for devices that power our digital society," stated Heini Saloniemi, manager, process engineering, at VTT. "After a thorough product evaluation of lithography coating systems, VTT selected the EVG120 in a competitive tender, with coating uniformity and repeatability of coating thickness among the key evaluation criteria. We look forward to receiving the new EVG120 system, which will enhance our lithography process capabilities and allow us to explore new avenues of research."

The EVG120 automated resist processing system is designed to provide reliable and high-quality coating and developing processes in a universal platform. Its versatility and flexibility, as well as its low cost of ownership, makes it an ideal system for research environments where many development projects may be running in parallel, while its high throughput rates enable its use in volume production.

New features on the updated platform include: separation of wet processing modules to enable constant conditions chamber to chamber; integrated chemistry cabinet for resist pumps and bottles (including support for high-viscosity resists); new robot handling system that provides the highest reliability and increased throughput; and optional humidity and temperature control for constant environmental conditions.

"As the leading research institute in Finland, VTT has a strong global network of industry partners throughout the world to transform breakthrough research into new products and services in renewable energy, health care, smart industry and smart city, as well as beyond. EVG is working tirelessly to support our key customers such as VTT in these endeavours," stated Thomas Wagenleitner, product management director at EV Group.

Thermco Systems Expands Global Operations With Acquisition Of CSD Epitaxy
Teledyne E2v’s Emerald 12M And 16M Image Sensors Enter Mass Production
Mirsense And XenomatiX Win Technology Showcase At European MEMS, Imaging And Sensors Event
Imec.xpand Raises EUR 117 Million To Invest In Innovative, Early-stage Ideas
Palomar Technologies Awarded ISO 9001:2015 Certificate
NanoScientific Symposium On Scanning Probe Microscopy (SPM)
Shin-Etsu Silicones Of America Primed For Growth
Pfeiffer Vacuum Opens New High-tech Production Site In Romania
Biosensor Allows Real-Time Oxygen Monitoring For ‘Organs-On-A-Chip’
Cadence Recognized With Four 2018 TSMC Partner Of The Year Awards
Brixon Licenses Sensor Technology From ORNL
Webinar: On-Site Hydrogen Production Improves Safety, Quality, And Productivity In Wafer, Chip And Semiconductor Manufacturing
Infineon Expands U.S.-based IoT Security Research And Development Programs
Future Of Quantum Technology In UK Given Significant Funding Boost
ON Semiconductor To Demonstrate Innovation In Automotive, Power Conversion And IoT At Electronica
ESI’s New Allegro LC Extends High-Volume Test Capability To Larger MLCCs
Picosun Launches New Solutions Specially Targeted For Healthcare Industries
Himax Technologies Rebukes Motley Fool Article
Helium Leak Detector Solutions
VTT Is Ranked Fourth In The World's Largest Research Funding Programme
Intel Respond In Court To Qualcomm’s Claims
RIT Awarded $422K Grant For PIC Technology
Siltectra Ramps Up Wafering Services
AES Announces Acquisition Of Advanced Research Manufacturing (ARM)

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info