Linde LienHwa Launches SPECTRA EM


Linde LienHwa (LLH), supplier of gases and chemicals to the electronics industry in the Asia Pacific region, is introducing the initial portfolio of its highest quality brand of electronic materials called SPECTRA EM at SEMICON Taiwan. This new product line, along with its continuing investment in local production of electronic special gases (ESGs) and electronic bulk gases, enhances LLH's portfolio to meet the growing demand of Taiwanese and regional customers in the semiconductor and display industries. LLH is leveraging access to global expertise to build first-in-kind capabilities in Taiwan to innovate locally for customers.

Building upon its SPECTRA family of premier electronic offerings, Linde LienHwa is proud to debut its SPECTRA EM line of electronic materials, distinguished by industry-leading purity, packaging and analysis. The initial products included in the SPECTRA EM family include C3F8, CF4, C4F8, CO, F2/N2 mixtures, HBr, HCDS, NF3 and SF6.

"These products exemplify our commitment to quality, expertise and partnership," states Alex Tong, President of Linde LienHwa. "Over the past three years, we have executed on our strategy to localize production and know-how of electronic special gases to best serve our customers. The SPECTRA EM portfolio delivers on our promise for the highest quality available products."

SPECTRA EM products join an established family of industry-recognized offerings. SPECTRA-N nitrogen generators lead the way in flexible and power-efficient nitrogen supply for semiconductor and display customers. SPECTRA lithography gases have pioneered reliable, precision blends of neon-halogen mixtures, which have enabled DUV (deep UV) lithographic patterning for high performance and efficiency manufacturing.

New production of fluorine mixtures in Guanyin, Taiwan and hydrogen bromide in mainland China

Linde LienHwa has recently commissioned production of two of the newest SPECTRA EM products. Utilizing fluorine generation technology developed by JV partner Linde, Linde LienHwa has expanded production at its Guanyin, Taiwan location to offer fluorine mixes. LLH is the first electronics-grade fluorine facility in Taiwan and is the only grade of F2 manufactured specifically for the electronics industry. Fluorine is a highly reactive gas and it is combined into a 20% blend with nitrogen to yield a mixture that is safe for compression, packaging and transport. Linde also employs this same technology to supply customers in the United States. The fluorine mixtures are used to clean semiconductor manufacturing equipment.

In Tianjin, China, Linde LienHwa has invested to create a new source of electronics-grade hydrogen bromide (HBr) for customers in mainland China, Taiwan and throughout the APAC region. Linde is a leading producer and supplier of HBr globally with production facilities in the US. By employing best practices for purification, analysis and packaging for the new source, Linde LienHwa ensures that its customers will now have an additional source and supply capacity produced in Asia that matches their quality requirements. HBr is a compressed gas that is used as a selective etchant, allowing semiconductor manufacturers to remove one material while leaving a second material untouched. This process has become increasingly important as leading-edge chip manufacturers produce 3D structures to make transistors smaller, faster and use less power.

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