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Scalable Solution For Electrical Fault Isolation Of Semiconductor Devices

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With the new Thermo Scientific Meridian S inverted Static Optical Fault Isolation (OFI) solution, semiconductor failure analysis labs can future-proof their operations with a fully scalable solution. Semiconductor failure analysis engineers and technicians can isolate electrical faults that cause semiconductor devices to fail at end-of-line test. These defects, such as metal shorts, opens, and transistor-level leakage, are localized in the failure analysis workflow to troubleshoot process or design failures and increase overall device manufacturing yield. This all-in-one system includes both photon emission and static laser stimulation applications, and is a cost-effective, high-sensitivity solution for localizing electrical failures in semiconductor devices.

The addition of Meridian S also provides semiconductor manufacturers with a reliable static OFI tool that delivers performance. Multiple upgrade paths are available, bringing the industry-leading capabilities of dynamic OFI and high sensitivity emission as customers' lab needs develop.

“Meridian S offers high optical resolution and enhanced sensitivity with a robust upgrade path for future expansion, all in a single tool,” said Debbora Ahlgren, senior director, materials and structural analysis, Thermo Fisher Scientific. “The result is a high return on investment and a concrete roadmap as customers increase their OFI capabilities.”

Meridian S offers several benefits designed to maximize performance:

• High-sensitivity probing: Meridian S includes FDx with Active Probe, a next-generation Static Laser Simulation (SLS) amplifier for applications such as Optical Beam Induced Resistance Change (OBIRCH) failure analysis.

• Static OFI analysis on a broader range of devices and package types: Meridian S offers both topside probing for flip chip packages and wafer pieces as well as backside probing for conventionally packaged devices.

• Easy-to-use software: Meridian S is optimized to work with the proven Sierra software platform for enhanced ease of use and offers a number of features, including Live Emission mode which allows users to view photon emission signatures emerge in real-time.

• Laser marker option for physical markings of fault locations: Meridian S provides a laser marker option with an accuracy level better than 2 microns.

Meridian S will ship in the fourth quarter of 2019. More information can be found at: Thermofisher.com/MeridianS.