+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
News Article

ALD20 UHP Valve Offers New Possibilities for Semiconductor Production

News

Advanced valve enables chip fabricators to experiment with new precursors due to higher flow capacity, thermal stability, and extreme precision.

Swagelok, a provider of fluid system products, assemblies, and related services, has announced the release of a new ultrahigh-purity (UHP) valve for high-flow applications—the ALD20. Since introducing atomic layer deposition (ALD) valve technology to the market, Swagelok has worked with semiconductor tool manufacturers and chip fabricators to provide the performance needed to keep pace with quickly changing process requirements.
The new ALD20 valve is the latest result of this collaboration, allowing forward-thinking process designers the flexibility to experiment with low-vapor pressure chemistries that may hold the key to tomorrow’s competitive advantage.
The ALD20’s patent-pending design maximizes production process efficiency and deposition consistency by providing flow coefficients two to three times what can be achieved using today’s standard ALD valve technology. It can deliver a flow rate of up to 1.2 Cv in the same footprint (1.5 in.) as existing ALD valves, allowing some users to boost throughput without retooling existing equipmentor making additional process changes. The other standard version ALD20 valve with a slightly larger footprint width (1.75 in.) provides an even greater flow rate of up to 1.7 Cv. Custom set flow coefficients are also available.
Designed for peak process consistency, the ALD20 can be fully immersible in a gas box from 50°F(10°C) up to 392°F (200°C), enhancing thermal stability and deposition uniformity. It also features a valve body comprised of 316L VIM-VAR stainless steel or Alloy 22—offering enhanced corrosion resistance to withstand aggressive media—as well as a highly polished bellows with a 5 μin. Ra finish to support clean operation for long-term process integrity.

“The ALD20 is a direct response to the rapidly evolving needs of the semiconductor industry,” said Garrick Joseph, director of marketing, semiconductor, for Swagelok.
“Through partnership with industry leaders and application of fluid system engineering expertise, we are pleased to launch a product that allows customers to effectively use precursor gas chemistries that previously may have been considered too challenging or too expensive to employ, but which could be crucial to the development of the next generation of chip technology.”
The ALD20 is available today in modular surface-mount configurations with two or three ports, in straight configurations with tube butt weld and male or female VCR® face seal fitting end connections,and in multiport valve configurations to optimize flow paths within existing or new systems. A hightemperature optical position sensor is availble as an add-on component as well.

Purdue, imec, Indiana announce partnership
Resilinc partners with SEMI on supply chain resilience
NIO and NXP collaborate on 4D imaging radar deployment
Panasonic Industry digitally transforms with Blue Yonder
Global semiconductor sales decrease 8.7%
MIT engineers “grow” atomically thin transistors on top of computer chips
Keysight joins TSMC Open Innovation Platform 3DFabric Alliance
Leti Innovation Days to explore microelectronics’ transformational role
Quantum expansion
indie launches 'breakthrough' 120 GHz radar transceiver
Wafer fab equipment - facing uncertain times?
Renesas expands focus on India
Neuralink selects Takano Wafer Particle Measurement System
Micron reveals committee members
Avoiding unscheduled downtime in with Preventive Vacuum Service
NFC chip market size to surpass US$ 7.6 billion
Fujifilm breaks ground on new €30 million European expansion
Fraunhofer IIS/EAS selects Achronix embedded FPGAs
Siemens announces certifications for TSMC’s latest processes
EU Chips Act triggers further €7.4bn investment
ASE recognised for excellence by Texas Instruments
Atomera signs license agreement with STMicroelectronics
Gartner forecasts worldwide semiconductor revenue to decline 11% in 2023
CHIPS for America outlines vision for the National Semiconductor Technology Center
TSMC showcases new technology developments
Alphawave Semi showcases 3nm connectivity solutions
Greene Tweed to open new facility in Korea
Infineon enables next-generation automotive E/E architectures
Global AFM market to reach $861.5 million
Cepton expands proprietary chipset
Semtech adds two industry veterans to board of directors
Specialty gas expansion
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: