Full Range Of Dry Roots Process Pumps For Harsh Duty Applications (XN Series)
New XN models feature :
- Advanced materials for full corrosion resistance
- New integrated options for increased pump health monitoring capabilities and extending pump service intervals
- Extended process lifetime
- Low power consumption
A 3004: The new standard for 3000 m3/h pumping speed - CVD Applications - Highest performance at the lowest operating cost
On the most advanced CVD applications, the A 3004 pump offers the best compression ratio under process flow operation for a wider process window.
§ Better Tool uptime
o High MTBF
o Full corrosion resistant materials
o Wide operating temperature range
o Integrated hot N2 injection prevents exhaust clogging
o Low power consumption
o Low cost of ownershi
o High efficiency motors
o Optimized electrical heaters
o Extended monitoring functionalities provide better control of pump conditions (water sensor, vibration box)
§ IP33, Semi S2 and UL compliant
- Semiconductor industry (Etch, PECVD, SACVD, ALD, ...)
- Coating industry: Displays, Photovoltaic & LED
AngelTech Live III: Join us on 12 April 2021!
AngelTech Live III will be broadcast on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST)
and will feature online
versions of the market-leading physical events: CS International
and PIC International
PLUS a brand new Silicon Semiconductor International
Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.
2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.
We shall also look at microLEDs, a display with many wonderful attributes, identifying processes for handling the mass transfer of tiny emitters that hold the key to commercialisation of this technology.
We shall also discuss electrification of transportation, underpinned by wide bandgap power electronics and supported by blue lasers that are ideal for processing copper.
Additional areas we will cover include the development of GaN ICs, to improve the reach of power electronics; the great strides that have been made with gallium oxide; and a look at new materials, such as cubic GaN and AlScN.
Having attracted 1500 delegates over the last 2 online summits, the 3rd event promises to be even bigger and better – with 3 interactive sessions over 1 day and will once again prove to be a key event across the semiconductor and photonic integrated circuits calendar.
So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.
REGISTER FOR FREE