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CleanSurF - AP&S New Cleanliness Guarantor For Carriers, Boxes, SMIFs And FOUPs

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CleanSurF - the new AP&S cleaner ensures maximum cleanliness in accordance with highest purity standards to secure the process chains in semiconductor manufacturing and ensure maximum productivity.

The CleanSurF convinces with a loading capacity of up to 12 x 12 inch FOUPs per run at optimized recipe time. In combination with a compact footprint of approx. 3 square meters and a very low consumption of water and nitrogen, the CleanSurF® offers extremely attractive TCO values.

The CleanSurF concept is optimized for both manual and automatic loading. Two newly developed components make a decisive contribution to optimum particle and AMC (airborne molecular contamination) removal performance and shorter process times

  1. An innovative nozzle concept enables flexible, 360-degree, separately controllable handling of the nozzles. More than 50 nozzles (DIW as well as N2 nozzles) are installed in the tool and ensure optimum cleaning results.
  2. A new carousel design consisting of motor technology, robust rotating frames and flexible equipment fixtures offers new locking devices with additional safety functions. During manual loading, the rotating frame is firmly fixed, allowing convenient and fast loading.

The latest software technology including HMI according to Semi II standard, guarantees maximum process reliability. User-friendly monitoring ensures convenient and simple system handling. This includes: schematic display of the process chamber, of process values and active spray elements, as well as simple recipe management and a wide range of export functions.

The autarkic process chamber convinces with a large loading window. The clear design ensures maximum safety as well as simple installation and maintenance. Loading on the cleanroom side and access to the service area on the grayroom side means that valuable cleanroom space can be saved. As an option, a second process chamber door allows a gate function to separate the cleanroom from the grayroom.

The CleanSurF® extends the AP&S cleaner series, which so far has featured the CB II and CB III products. "In product development, the following were the key points for us: we wanted to develop a cleaner according to the latest technical standard, which enables both manual and automatic loading and increases the capacity of our existing cleaners. With our new CleanSurF®, we have achieved our goal to realize a cleaner with efficient throughput and attractive TCO," explains Tobias Bausch, CMO & CTO at AP&S.



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