Advanced thermal control techniques to improve wafer manufacturing yield

Finding hoses with proper insulation can mean the difference between success and failure.

By Margaret Brennan, Principal Engineering Lead, Application Solutions, Swagelok Company

Demand for high-quality semiconductor wafers has grown exponentially as artificial intelligence and other technological advances require more sophisticated chips. The process of creating the chips has never been more complex, and fabrication plants, OEMs, and all parts of the value chain are seeking new ways to maximize efficiency and improve profitability.

To maximize chip yields, the thermal loop is designed to keep deposition chambers at optimal temperatures throughout the manufacturing process. Ultralow temperatures are often used to regulate precise temperatures in the chamber. The challenge is that these temperatures, which can often be as low as -40°C, put additional pressure on each component of the thermal loop. This critical loop consists of chillers, pumps, heat exchangers, and all the components that keep them connected. A single malfunctioning component within that system can reduce fab efficiency and output.

Precision and cleanliness are also intersecting priorities in the world of semiconductor chip production. Temperatures inside the deposition chamber must be kept at optimized levels to ensure process stability. Simultaneously, the chamber must be kept entirely free of potential contaminants to maximize the throughput of chips during the delicate fabrication process.

Because significant engineering and design go into creating and maintaining an ideal fabrication environment, it can be easy to overlook the importance of selecting some of the more “basic” components that support the chip production process. Consider an industrial hose, which is used in countless applications throughout manufacturing facilities. In the semiconductor fabrication process, hoses play an important role, as they are commonly used to help the chillers regulate the environment necessary for production processes.

Getting hoses and other system components right means paying attention to three critical areas that affect how components will function in the thermal loop, including:

• Choosing the right components

• Finding the right insulative balance

• Using proper installation and performance testing

Before constructing a thermal loop for a semiconductor wafer fab, it is crucial to understand the importance of optimal temperature control. Finding suppliers who can guide engineers through this critical area and support the design and implementation of thermal loop construction will help fabricators optimize thermal management and maximize the number of high-quality chips produced.