Air Products to build new NF3 production facility in Asia
The new production facility will be operated by Air Products Korea Electronics and will be constructed at the company's existing specialty gas site in Ulsan. The first phase of the new plant will produce in excess of 500 metric tons per year and will be completed in late 2007.
Upon completion, Air Products' global NF3 capacity will be more than 2,500 metric tons per year. This will be the company's second Electronic Specialty Material (ESM) investment at Ulsan after recently bringing on-stream an ultra-high purity ammonia plant in 2005.
This facility complements other Korean ESM facilities in Shiwha, Banwol, Cheonan and Pyeongtaek.NF3 is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices.
When compared with competing products, NF3 offers customers significant reductions in emissions, throughput increases of up to 30 percent, longer chamber life and faster clean rates. NF3 is also stable and non-flammable, making it a safe gas to transport, store and deliver to customers around the world.
"This new manufacturing facility is part of a multi-year investment strategy" said Mike Hilton, vice president and general manager, Electronics and Performance Materials at Air Products.
