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Aviza receives order for Celsior ALD system from leading DRAM manufacturer
AvizaTechnology, Inc has announced that it has received an order for its next-generation single wafer atomic layer deposition (ALD) system, Celsior, from;A leading DRAM manufacturers
AvizaTechnology, Inc has announced that it has received an order for its next-generation single wafer atomic layer deposition (ALD) system, Celsior, fromA leading DRAM manufacturers. The system is scheduled for installation at the DRAM maker's U.S.-based facility and will be utilized for fabricating 90-nm DRAM devices on 200-mm wafers. This announcement marks the latest milestone in a series of consecutive orders for Aviza's Celsior single wafer ALD system for high volume manufacturing in Europe, China, Taiwan and now the United States. Previous Celsior systems shipped for production-scale manufacturing have been 300-mm systems. "We are very excited that Celsior continues to gain increased adoption among leading chipmakers worldwide," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology, Inc. "The recent order from the major DRAM company in the U.S. complements Aviza's presence at multiple sites worldwide quite well, demonstrating Celsior's process capabilities in meeting rigorous technology and productivity requirements needed to manufacture tomorrow's advanced IC devices at the 90-nm and below technology nodes."
