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News Article

Tegal receives repeat PVD production system order From US customer

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Tegal Corporation announced that it had received a repeat order for its Endeavor AT PVD cluster tool from a U.S.-based global, power management device manufacturer.
Tegal Corporation announced that it had received a repeat order for its Endeavor AT PVD cluster tool from a U.S.-based global, power management device manufacturer. The new Endeavor system will be shipped to a fab in the U.S. and will be used in the production of next-generation IGBTs and power MOSFET ICs. Such power management devices are built into servers, computers, cars, satellites and home appliances. “The Endeavor PVD System was selected on the basis of our proven track record in high volume manufacturing,” said Thomas Mika, President and CEO of Tegal Corporation. “The Endeavor PVD system has proven capability to deposit high purity, stress-free metal films on unsupported wafers as thin as 65 microns with high handling yield.” “Tegal has continued to offer a high level of support needed for high-volume IC production,” said Murali Narasimhan, Vice President of Marketing at Tegal. “Our customer is focused on enabling technologies in power management for products that work smarter, run cooler, and raise productivity through innovative MOSFET technology. Backside Metallization with good adhesion and Ohmic contact to the current drain of a power MOSFET is essential for low on-resistance of these devices. Modulation in film stress through the magnetron technology of the Endeavor’s S-gun based PVD reactor enables ultra-thin wafers to undergo the PVD process without cracking.”
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