News Article
Cabot Microelectronics and DuPont Air Products in patent infringement dispute
Cabot Microelectronics Corporation announced that it filed a legal action against DuPont Air Products NanoMaterials LLC (DA Nano) for DA Nano's manufacture and marketing of certain CMP slurries that infringe patents owned by Cabot Microelectronics.
Cabot Microelectronics Corporation announced that it filed a legal action against DuPont Air Products NanoMaterials LLC (DA Nano) for DA Nano's manufacture and marketing of certain CMP slurries that infringe patents owned by Cabot Microelectronics. The affected DA Nano products include those used for tungsten CMP.Cabot Microelectronics filed its complaint as a counterclaim in response to an action filed by DA Nano in the United States District Court for the District of Arizona regarding some of the patents at issue."Cabot Microelectronics remains committed to the enforcement of our intellectual property and protection of our significant investment in patent-protected research and development," stated H. Carol Bernstein, Cabot Microelectronics' Vice President, Secretary and General Counsel. "We believe certain DA Nano products infringe our tungsten CMP technology, and we are disappointed that this far they have refused to switch to non-infringing technology. We look forward to the successful resolution of this litigation."
