New Taiwan foundry customer selects tools for 90-nm DRAM production
Aviza Technology has announced that it has received a multi-system, multi-chamber order for its Celsior single-wafer, atomic layer deposition (ALD) system from a leading foundry in Taiwan. The foundry, a new ALD customer for Aviza, plans to utilize the Celsior systems for high-volume DRAM device production at the 90-nm and below geometries. The tools will help support the foundry's technology requirements and capacity targets for its 300-mm fab.
"We are very pleased to have received this multi-system order from this foundry customer, which also marks a new ALD customer win for Aviza," said Subrata Chatterji, Vice President and General Manager, ALD Business Unit of Aviza Technology. "This order was a result of Aviza's ability to demonstrate itsexpertise and experience with high-volume ALD production to enableadvanced DRAM device manufacturing."