News Article
Order for PVD tool from European foundry targets high-growth in MEMS markets
Tegal Corporation has announced it had received an order for an Endeavor AT PVD cluster tool from a top-tier MEMS foundry located in Europe.
Tegal Corporation has announced it had received an order for an Endeavor AT PVD cluster tool from a top-tier MEMS foundry located in Europe. The Endeavor system will be installed in the customer's recently-expanded 150mm MEMS fab, and will be used to produce MEMS devices for the telecommunication, automotive, biomedical, and consumer electronic markets."The Endeavor PVD system was selected by our customer on the basis of the Endeavor's production track record, its versatility, and on the quality of the films that the Endeavor AT produces," said Thomas Mika, President & CEO of Tegal Corporation. "Tegal's MEMS customers, like this major MEMS foundry, are investing in expanded production capacity to support the surging demand for MEMS devices in applications such as cell phone handset silicon microphones, where unit shipments are expected to double, from 300M to 600M yearly, by 2009. Our Endeavor AT system was purchased to support these commercial MEMS fabrication needs."
