News Article
Order for production tool will further DRIE processing for 3D semiconductors
Alcatel Micro Machining Systems has announced that it has received an order from STMicroelectronics (ST) for its new AMS 4200 production tool for advanced device technology.
Alcatel Micro Machining Systems has announced that it has received an order from STMicroelectronics (ST) for its new AMS 4200 production tool for advanced device technology.
“We were looking for a reliable partner capable to develop the best DRIE process and meet our production requirements in term of quality and support. The new Alcatel AMS 4200 DRIE cluster tool will enable us to meet the challenge of a deeper etching in the field of 3D Semiconductors, crucial for various applications such as IPAD (Integrated Passive and Active device), SIP (System in Package) and Power devices” said Claude Morant, ST Tours Operation Director.
"We are very pleased to reinforce our collaboration with ST," said Jean-Marc Gruffat, Director of Products for Alcatel Micro Machining Systems.
“We were looking for a reliable partner capable to develop the best DRIE process and meet our production requirements in term of quality and support. The new Alcatel AMS 4200 DRIE cluster tool will enable us to meet the challenge of a deeper etching in the field of 3D Semiconductors, crucial for various applications such as IPAD (Integrated Passive and Active device), SIP (System in Package) and Power devices” said Claude Morant, ST Tours Operation Director.
"We are very pleased to reinforce our collaboration with ST," said Jean-Marc Gruffat, Director of Products for Alcatel Micro Machining Systems.
