+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
*/
News Article

ROHM and HAAS delivers ultra-low defectivity CMP pad for advanced Copper barrier processes

News
Rohm and Haas Electronic Materials have introduced the EcoVision 4000 ultra-low defectivity performance CMP pad designed specifically for advanced copper barrier processes for 45 nm technology nodes and beyond.
Visionpad Product Line Adopts Application Specific Approach

Rohm and Haas announce cmp pad for Cu barrier

Rohm and Haas Electronic Materials have introduced the EcoVision 4000 ultra-low defectivity performance CMP pad designed specifically for advanced copper barrier processes for 45 nm technology nodes and beyond.

"As customers switch to advanced processes and nodes, we offer products designed for their specific polishing needs," explained Cathie Markham, vice president of technology for Rohm and Haas Electronic Materials, CMP Technologies. "The EcoVision 4000 pad is representative of this shift towards application specific pads. Throughout our entire VisionPad platform, we provide customers with the best and most cost effective solutions for their specific CMP process requirements."

The pad's manufacturing process produces a surface that results in increased contact area between the pad and the wafer. This reduces defects and improves die yields by minimizing scratches and chatter marks across the wafer resulting in best–of-class defectivity performance. Unlike soft pads, the EcoVision 4000 pad is conditioned, allowing for pad surface regeneration to achieve optimal polishing results that are consistent throughout the pad's life as well as from pad to pad.
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: