SUSS Reveals 3rd Generation 200mm Automated Coater
SUSS MicroTec has launched the third generation of the
ACS200 Coating and Developing Platform.
This newly developed tool offers a mix of innovation
and production proven technology components of the ACS200Plus and Gamma
platforms. The ACS200 Gen3 offers the capability to combine four wet process
modules with up to 19 plates for high volume production.
The configuration flexibility of modules and
technologies meets not only the requirements of the Advanced Packaging, MEMS
and LED markets, it also bridges the gap between research & development and
high volume manufacturing. In particular, the newly designed coater module
offers state of the art open bowl spin coating as well as the patented GYRSET closed
cover coating technology.
'The ACS200 Gen3 combines innovative design and
production proven functionality with the modularity of our ACS200Plus and the
compactness of our Gamma platform', said Frank P. Averdung, President and CEO
of SUSS MicroTec. 'With this new generation we can offer our customers an
outstanding coater / developer platform designed for precision and high yield
production while focusing on low cost of ownership.'