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Axcelis wins repeat order for implanter for memory devices

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Axcelis Technologies has received a follow-on order for the Optima HDx high current implanter from a leading Asia Pacific chipmaker.

he Optima HDx will be used in high volume manufacturing of leading edge memory products and next generation device development. The system is scheduled to ship in the third quarter.



Optima HDx implanter

"We're pleased to be able to build on our relationship with this important customer and expand our installed base of Optima HDx implanters," says John Aldeborgh, executive vice president, customer operations.

"This order extends our market leading position for systems that provide cold implant capability for chipmakers realizing the benefits of Axcelis' unique damage engineering solution to achieve leading edge device performance. The Optima HDx combines maximum dose rates, inherently found in its spot beam technology, with proprietary wafer temperature control during implantation, providing maximum productivity and process advantages," he continues.

The Optima HDx high current implanter provides solutions for device manufacturers' highest dose requirements with the versatility and extendibility to provide solutions beyond today's 2Xnm technology node.

The Optima HDx utilises one of the industry's most advanced ion source technologies, coupled with Axcelis' innovative wafer temperature control system that maximises yield and profitability. The Optima HDx delivers this performance with a simple, low cost and highly reliable design, providing a significant advantage over more complex and costly designs.

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