Imec manufactures image detectors for FEI's scanning electron microscopes
Nanoelectronics research center imec has announced that it has successfully qualified a set of custom high-quality electron detector die products for FEI Company. The dies are manufactured at imec and integrated in FEI's scanning electron microscopes (SEMs), helping to enhance the tools' performance and reliability. This milestone achievement is another confirmation of the capability of imec's 200mm process line, developing and manufacturing custom specialty chip solutions.
Imec developed and processed the back scattered and stem electron sensors according to FEI's custom designs and specifications, with focus on superior sensitivity to low energy electrons and high reliability.
Imec offers companies all the services needed to turn innovative ideas into customized microsystem products. The imec toolbox contains a wide variety of device technologies on 200mm (e.g. CMOS, Si-photonics, MEMS, image sensors, packaging ...) as well as design, testing and reliability. Imec's services range from feasibility studies over design and technology development to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production.
