Aerotech "“ Solutions that Inspire Confidence
Aerotech has a long history of engineering and manufacturing motion systems and components for high-precision wafer processing, scanning electron microscopy (SEM), wafer bumping, 450 mm wafer manufacturing, lithography equipment, and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography. So whether you need off-the-shelf wafer bumping components or a custom-engineered SEM system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.
Get the Vacuum
Aerotech's complete, multi-axis, vacuum-compatible motion systems are ultra-high accuracy with nanometer-level in-position stability. For applications such as SEM, vacuum preparation for 10-8 Torr (1.3 x 10-8 mbar) is achieved by incorporating vented hardware, vacuum compatible lubrication, and special cabling. Custom systems can achieve up to 10-9 Torr vacuum levels. Aerotech can provide systems with partial pressure (outgassing) limits at specific atomic mass units. Systems are RGA verification tested.
Magnetic Field Control, Cooling, and Cleanrooms
Aerotech also manufactures brushless linear and rotary motors with tightly controlled magnetic fields that can be liquid or gas-cooled to improve thermal management. Special handling and cleaning procedures along with careful material selection allow for the lowest Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) possible. Aerotech cleanroom facilities include large system ISO 14644-1 Class 6 (Federal Standard 209E Class 1000) and cell specific ISO Class 5 (Class 100) capabilities. The large active area includes pre-/post-dressing areas, dedicated product transfer, and large main product assembly areas.
One-Stop-Shop
Aerotech manufactures a wide variety of motion control and positioning systems and components including automated direct-drive and piezo nanopositioners; planar and rotary air-bearing stages; high-speed gantries; mechanical-bearing linear, rotary, and lift stages; brushless linear and rotary servomotors and drives; stand-alone and software-based motion controllers; galvanometers; goniometers; and gimbals/optical mounts. Our expertise and ability to provide custom motion components and systems is unmatched. Our custom manufacturing capability is further augmented by our long history of providing vacuum-prepped and cleanroom-ready positioning systems and components.
Around the World
Aerotech is committed to supporting our customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the U.S., as well as representatives across the globe. We operate full sales and service facilities in the U.K., Germany, Japan, Taiwan, and China.
