Linde to install world's largest on-site fluorine plant at SK Hynix M14 plant
Linde Electronics and Specialty Gases has announced a new on-site fluorine plant to supply SK Hynix Semiconductor, a world-leading manufacturer of DRAM and NAND flash memories. The plant, which will be the world's largest on-site fluorine (F2) plant, will supply the M14 line in Icheon, South Korea from the end of Q2 2015. This expansion of Linde's patented on-site F2 technology to this new facility follows successful implementations at all SK Hynix's production sites.
Carl Jackson, VP, Technology and Applications Development, Linde Electronics, said: "We're proud to have had such a successful relationship with SK Hynix over the last 10 years, which has demonstrated the process benefits possible with on-site F2 along with a perfect safety record. We look forward to continuing to work together to further help SK Hynix improve the cost effectiveness of its manufacturing process."
Linde's on-site F2 technology has an established presence for chamber cleaning applications across semiconductor, display and solar industries. It has been proven to be a highly effective fluorinated cleaning gas, demonstrating reductions in cleaning and recovery time and reduced plasma power consumption including, in some cases, elimination of the requirement to generate plasma for cleaning and reduced mass of chemicals required compared to the fluorinated gases typically used. Increasing concerns over the environmental impact of NF3 and potential legislation that could restrict its use in the future also contribute to interest in this proven technology.
