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Why the mask world is moving to curvilinear
If you’ve been to a lithography or photomask technology conference
lately, you’ve likely noticed a trend: many papers and talks on
curvilinear masks, curvilinear OPC, curvilinear ILT, curvilinear mask
process correction (MPC), and curvilinear mask formats. The photomask
industry is experiencing a fundamental shift from Manhattan masks to
curvilinear masks. Part 2.By Leo Pang, D2S, Inc.
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NEWSLETTER SPONSOR: Trymax
When Plasma Matters
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Want to know more? Meet our team at SEMICON Europa at booth C1 255!
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