Nano-Master
Nano-Master products include PECVD systems for deposition of SiO2, Si3N4, DLC, CNT and Graphene; PA-MOCVD Systems for InGaN and AlGaN; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-beam Evaporators, Ion Beam and Reactive Etching Systems; Atomic Layer Etching, Atomic Layer Deposition Tools; Thermal Vacuum Systems; Megasonic Cleaning Systems and Photoresist Stripping Equipment.
NANO-MASTER Megasonic Single Wafer and Mask Cleaners provide reproducible, uniform and state-of-art megasonic cleaning. We incorporate patented damage-free megasonic cleaning, chemical cleaning, brush cleaning and drying in one process step. NANO-MASTER Plasma Ashing and Cleaning Systems are designed to meet a wide range of needs from wafer resist stripping to surface modification of batch as single wafer loads.
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