VIDEO
Helping to optimise increasingly sensitive CMP processes as nodes shrink
Video Summary
Kristan Bahten, Malema Sr. Product Manager, discusses the challenges and opportunities of addressing precision flow control as a bottleneck in CMP performance. Kristan outlines the ultrasonic sensing and Coriolis mass-flow measurement solutions available to fabs right now, as well as looking ahead to the innovations in slurry metrology and flow control intelligence which will help to shape the next generation of CMP performance.
