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Process Development

STMicroelectronics claims the world's first volume production embedded Flash memory in an advanced 180nm CMOS technology. ST's 180nm embedded Flash technology offers the world's smallest cell size, with each Flash cell occupying just 0.37micron2.

The memory supports popular RISC microprocessor cores such as the ARM7, ARM9
and ST10. Demonstrator chips featuring these cores are already undergoing
customer qualification for the full automotive temperature range.
Fully compatible with the basic 180nm logic process (libraries and cores),
the 180nm Embedded Flash technology includes a flexible macrocell. This
allows customer-specified memory arrays up to 10Mbits to be quickly defined,
with sectorisation down to 8kBytes. The macrocell also includes BIST
(Built-In Self-Test) features.



Motorola claims to have eliminated the limitations of existing IC packages
with its new power quad flat pack no-lead (PQFN) product. The PQFN surface
mount package is aimed at meeting the high power dissipation requirements of
automotive, industrial, marine and commercial applications.



Clem Brown, manager of power packaging development at Motorola's
Semiconductor Products Sector, reports:

"We've designed a packaging platform
that is flexible enough to accommodate almost any kind of design and
integrate up to four die in the same package - all in an amazingly small
finger-tip-size package."



The PQFN uses a 0.5mm-thick copper lead frame and heavy gauge aluminium bond
wires to efficiently transfer heat out of the package while providing low
electrical on-resistance. Conduction is the primary mode of heat transfer
that moves the generated heat away from the die surface and out of the
package through exposed heat sinks on the bottom surface of the PQFN.
Motorola is currently working on more than 20 configurations of the PQFN
package with lead counts ranging from 16 to 35. Custom versions of the PQFN
are expected to be available for unique applications or specific customers.
Motorola has applied for JEDEC registration for its line of standard PQFN-S
platform products, which range in size from 5mm to 12mm.
The first product launched in the format is Motorola's MC33982
self-protected silicon switch. This device is a 2mOhm high-side power switch
housed in a 12x12mm PQFN.



The package is expected to be qualified for commercial and industrial
applications shortly and for automotive applications by the end of the year.
The PQFN package is expected to reach volume production by the end of the
year.



Service Support Specialties (S-Cubed) introduced its Flexi-PCS photoresist
processing system. The company is represented in Europe by Hillelian
Concepts. Flexi-PCS is based upon the FlexiFab system, which has been in
production as both new and remanufactured systems since 1987.
S-Cubed has implemented PC base control for improved performance at a very
low cost. Servo motor actuation replaces the usual combination of stepper
motors and sensors. The need for a large number of sensors in traditional
tracks can hinder reliability.



Process use at 0.18 and even 0.13microns is considered possible by
representative at Hillelian. Uniformity is as good as 28Angstroms (3sigma).
The system produces conformal coatings even with 100micron side walls - a
feature that could be attractive for micro-electro-mechanical system (MEMS)
production.



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VIEW SESSIONS
Onto Innovation Announces New Inspection Platform
South Korean Point Engineering Chooses ClassOne’s Solstice S8 For Advanced Semiconductor Plating
TEL Introduces Episode UL As The Next Generation Etch Platform
Tescan And 3D-Micromac Collaborate To Increase The Efficiency Of Failure Analysis Workflows
Obducat Receives Order For Fully Automated Resist Processing Tool From A Customer In Asia
Can New Advances In CMOS Replace SCMOS Sensors In Biomedical Applications?
EV Group Establishes State-of-the-art Customer Training Facility
ASML Reports €14.0 Billion Net Sales
New Plant To Manufacture Graphene Electronics
AP&S Expands Management At Beginning Of 2021
Belgian Initiative For AI Lung Scan Analysis In Fight Against COVID-19 Goes European
Cadence Announces $5M Endowment To Advance Research
Siemens And ASE Enable Next-generation High Density Advanced Package Designs
Changes In The Management Board Of 3D-Micromac AG
DISCO's Completion Of New Building At Nagano Works Chino Plant
GOODFELLOW Confirms Membership In The BSI UK Graphene Group
Imec Demonstrates 20nm Pitch Line/Space Resist Imaging With High-NA EUV Interference Lithography
Will Future Soldiers Be Made Of Semiconductor?
U.S. Department Of Defense Partners With GLOBALFOUNDRIES To Manufacture Secure Chips At Fab 8
SUSS MicroTec Opens New Production Facility In Taiwan
ITRI And DuPont Inaugurate Semiconductor Materials Lab
K-Space Offers A New Accessory For Their In Situ Metrology Tools
Tower Semiconductor Announced Program Creating An Integrated-Laser-on-Silicon Photonics Foundry Process
Panasonic Microelectronics Web Seminar

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