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Genus Wins Order In Europe

Genus announced multiple orders for its StrataGem200 atomic layer deposition (ALD) tool from a major European DRAM manufacturer.
Genus announced multiple orders for its StrataGem200 atomic layer deposition (ALD) tool from a major European DRAM manufacturer.


This order marks the second DRAM maker to put Genus ALD tools into production. The DRAM maker will implement the ALD technology into 200mm production at the 90nm node.


"This is the first customer to adopt ALD for 90nm production," reports Genus CEO Bill Elder.


At the 110nm node, ALD has been used on DRAM production lines for capacitor applications because of its ability to deposit advanced high-k dielectrics.



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