News Article
X-FAB Add Pressure Sensing To CMOS
X-FAB Semiconductor Foundries announced an expansion of its MEMS product line to include surface micromachining technology for absolute pressure sensors. The technology enables integration of absolute pressure sensors with X-FAB's CMOS technologies. The sensors can also be implemented as discrete components.
X-FAB Semiconductor Foundries announced an expansion of its MEMS product line to include surface micromachining technology for absolute pressure sensors. The technology enables integration of absolute pressure sensors with X-FAB's CMOS technologies. The sensors can also be implemented as discrete components.
The technology consists of piezoresistive, pressure-sensitive sensor elements on the surface of a silicon membrane. A vacuum is then established in a cavity located beneath the membrane, which finally enables the absolute pressure measurement.
The sensor is intended primarily for implementation in conjunction with automotive, industrial and medical technologies. Design rules and process specifications are available effective immediately.

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