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EVG Concludes Process Line Order

EV Group (EVG) has concluded an order for a complete micro-electro-mechanical system (MEMS) process line at Silex Microsystems of Sweden.
EV Group (EVG) has concluded an order for a complete micro-electro-mechanical system (MEMS) process line at Silex Microsystems of Sweden.


The deal includes an EVG520 fully-automated production wafer bonder, an EVG150 fully-automated resist processing system, an EVG620 fully-automated precision alignment system and an EVG301 mask cleaner.


Silex makes MEMS devices for the biotech/life science and telecom industries. The company uses a wafer bonding technique to produce its specialised components.


Jan Nerdal, CEO of Silex, reports: "We are building a complete six inch wafer production facility to satisfy the demand for increased capacity from our customers and to allow for continuing expansion of our business. The production systems from EV Group will be an essential part of our manufacturing process."



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