Info
Info
News Article

Helium Leak Detector Solutions

News

The semiconductor market demands helium leak detectors that deliver performance with dry pump technology that match the requirements of the vacuum process tool in use. Having a leak in a high vacuum semiconductor process tool is not an option. Locating all leaks on high vacuum systems with speed, accuracy and reliability requires a leak detector that is designed specifically for semiconductor vacuum process tools.

The Pfeiffer Vacuum ASM 390 and ASM 392 are the only Semi S2 and UL 61010 compliant helium leak detectors with unmatched performance with the most advanced leak detector technology on the market. ASM 390 offers a high helium inlet test port pumping speed starting at 10 l/s for fast response and cleanup time as well as ultra clean, high roughing capacity of 21 CFM to handle large volume systems without flaw or hesitation. High sensitivity of 1E-12 mbar l/s helium at full pumping speed is achieved with the Pfeiffer Vacuum SplitFlow 80 turbopump and multi-channel plate electron multiplier with digital preamp.
Both ASM390 and ASM392 incorporate Pfeiffer Vacuum ACP five-stage dry roughing pumps with the only frictionless vacuum displacement solution for long life and particle-free operation.

Need more performance for even more demanding test volumes of 1,000+ liters without parallel pumping? Consider the ASM 392 helium leak detector with twin high vacuum turbopumps by Pfeiffer Vacuum that deliver an even higher helium inlet test port pumping speed of pumping speed of 25 l/s.

Fast startup times of only two minutes and intuitive operator interface with single-button operation assures ease-of-use for any operator.
A color touch-screen control panel with SD card for recording capabilities and even an app for your smartphone for wireless operation via Bluetooth and Wi-Fi.
Intelligent, integrated automatic purge and variable frequency converter for the dry roughing pump assures performance and reliability. In addition, outboard
sniffing with sniffer probe and the ability to use 95/5 hydrogen tracer gas (95% Nitrogen/5% Hydrogen) are just a few of the added benefits offered with the ASM 390 and ASM 392.

Want the best helium leak detector technology solution in nine languages and universal power supply for worldwide recognition? Challenge the Pfeiffer ASM390 or ASM392with any mass spectrometer helium leak test solution you have. It's the best leak detector solution for your semiconductor vacuum process tool.


Challenge the ASM390 or ASM392 with any mass spectrometer helium leak test solution you have and discover why it's the best leak detector solution for your semiconductor vacuum process tool.

Semiconductor Memory Adoption To Be Augmented By Penetration Of Smartphones Across The Globe
Intel Shines Amidst The Carnage Of The 2019 Semiconductor Market
Picosun Delivers Multiple Production ALD Systems To Asia
Infineon Withdraws Outlook For FY20
Imec Demonstrates 24 Nanometer Pitch Lines With Single Exposure EUV Lithography
Mycronic Receives Order For An SLX Mask Writer
Particle Measuring Systems Releases 20 Nm Syringe Sampler
Critical Manufacturing Recognized By Gartner
SUSS MicroTec Purchases The Inkjet Printer Division Of Meyer Burger B.V.
Picosun Reinforces Local Operations During The COVID-19 Epidemic
ASYMTEK And DIMA Products Now Entirely Represented In Switzerland By Neutec Electronic AG
Park Systems Announces $1 Million Dollar Nano Research Grant Fund
High-end Inertial Sensors: At The Dawn Of A Mass-adoption?
Pfeiffer Vacuum Introduces Extremely Quiet, Dry Pumps
Efinix’s Trion FPGA Silicon Platform Expands Into Europe
EV Group Establishes Heterogeneous Integration Competence Center
Security Lithography Advances To Thwart IC Counterfeiting
DISCO Presented With The Supplier Continuous Quality Improvement (SCQI) Award By Intel Corporation
GLOBALFOUNDRIES And GlobalWafers Sign MOU
Semiconductor Manufacturing: Achieving Water Authority Compliance
50th Hollow Cathode Gas Plasma Source Ordered From Meaglow
Semiconductor Memory Market Worth Over USD 250 Bn By 2026
ACM Research Launches Stress-Free Polishing Tool For Advanced Packaging Applications; Delivers First Tool To Leading Chinese OSAT
A Burgeoning Secondary SME Market Is Inevitable

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}