Excellent batch process results with Picosun new generation tools
PICOSUN Morpher has continued to demonstrate excellent batch process results in the latest acceptance runs the company has performed for its customers in the global semiconductor industry. Excellent uniformities (<1% 1sigma) and single-digit particle levels have been reached at a number of acceptance runs with different film materials such as Al2O3 and SiO2.
PICOSUN Morpher was launched in 2019 for up to the 200 mm wafer markets. The tool’s strength is the adaptability to the changing needs of different business verticals, from corporate R&D to production and foundry manufacturing. It enables fully automatic and high throughput production of for example MEMS, sensors, LEDs, lasers, power electronics, optics and 5G components.
“The market showed great interest towards PICOSUN® Morpher after the launch and it has now become a leading product for the sub-300 mm production market. We have delivered PICOSUN Morpher to a variety type of customers, the latest including world leading manufacturers that use the tool both for pilot and high-volume manufacturing of integrated circuits”, states Juhana Kostamo, VP, Industrial Business Area of Picosun Group.
Earlier this year Picosun Group informed about record-breaking batch film quality results with PICOSUN® Sprinter, the Picosun new generation tool for 300 mm wafer markets.