News Article
CEA-LETI Takes Up EVG Hot Embosser
EV Group (EVG) has shipped and successfully installed a 200mm hot embossing and nanoimprinting system at the CEA-LETI research centre in Grenoble, France. The system will be used in collaboration between CEA-LETI and CNRS-LTM on micro- and nanotechnology research in the area of biochip and microfluidic devices.
EV Group (EVG) has shipped and successfully installed a 200mm hot embossing and nanoimprinting system at the CEA-LETI research centre in Grenoble, France. The system will be used in collaboration between CEA-LETI and CNRS-LTM on micro- and nanotechnology research in the area of biochip and microfluidic devices.
The EVG520HE semi-automated hot embossing system creates ultra-fine micrometre and nanometre scale features by pattern transfer from a stamp to a polymer substrate.
Hot embossing is a low cost and flexible fabrication technique, which has demonstrated polymer high aspect ratio microstructures as well as nanoimprinting patterns.
T he EVG520HE also has top- and bottom-heaters for low thermal stress between stamps and substrates and 200mm-substrate capability. The tool is looking for business in new fabrication techniques in the areas of BioMEMS, microfluidics and microoptics.

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