IMEC Takes SUSS RF MEMS Tool
RF-MEMS are small devices that use mechanical motion, for example, to toggle RF signal transmission between on and off. Commercialisation is currently hampered by reliability problems. Up to now, systems that allow optical monitoring and testing of RF-MEMS at different pressures and temperatures with RF signals applied, were not available. To answer these needs, SUSS MicroTec and IMEC closely collaborated to develop the SUSS PAV150 system into a custom-made RF MEMS test system.
The semiautomatic wafer probe system can test up to 200mm wafers in a vacuum environment up to 10-7mbar. It has a platen capable of holding up to 8 probe heads, 4 of which can hold RF probes. A thermal chuck enables temperature dependent measurements from -10C to +150C. A second arm on the microscope turret enables the alignment system to be swung out of the field of vision and replaced by other equipment such as a motion analyser. The RF probes and their calibration substrate remain constant in performance regardless of temperature in the range 10K to 393K.Room temperature is approximately 300K.
IMEC has agreed to act as SUSS' European centre for technology demonstrations and offers a test service for small batches of wafers.
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