DTU Nanolab expands silicon DRIE infrastructure with cassette-loading etch system from Samco
Deep silicon etching capability to support advanced microfabrication at DTU Nanolab.
Samco Inc. has announced that DTU Nanolab, the national nanofabrication facility at the Technical University of Denmark (DTU), will expand its silicon deep reactive ion etching (DRIE) capabilities with the installation of the RIE-800iPBC cassette-loading system. The system is scheduled for shipment in mid-2026 and will further strengthen DTU Nanolab’s dry etch infrastructure for silicon-based micro- and nanofabrication.
Unlike load-lock-only configurations, the RIE-800iPBC features cassette-to-cassette wafer handling, enabling improved operational efficiency and stable process conditions across multiple wafers. The system is designed for advanced silicon DRIE using the Bosch process and supports high-aspect-ratio etching required in a wide range of research and development activities.
During the evaluation process, the system demonstrated strong performance in key process metrics including across-wafer uniformity, repeatability, precise sidewall profile control, and reliable endpoint detection. These parameters are essential for reproducible silicon micromachining in applications such as MEMS devices, microfluidic structures, silicon photonics platforms, and other high-precision microfabrication processes carried out at DTU Nanolab.
The new DRIE tool will serve a diverse user base of academic and industrial researchers who rely on stable and repeatable silicon etching performance. By expanding cassette-loading DRIE capacity, DTU Nanolab enhances both throughput and process robustness within Denmark’s national nanofabrication ecosystem.
“The expansion of our silicon DRIE capability is an important development for DTU Nanolab,” said Jonas Michael-Lindhard, Process Engineering at DTU Nanolab. “Uniformity, repeatability, and well-controlled sidewall profiles are critical for many of our users. The new cassette-loading system will improve workflow efficiency while maintaining the high process quality required across multiple research applications.”
“We are pleased that DTU Nanolab selected the RIE-800iPBC to strengthen its silicon processing infrastructure,” said Tsukasa Kawabe, President and COO of Samco Inc. “Reliable silicon etching with strong process control and repeatability is essential for advanced microfabrication. Samco remains committed to delivering plasma etching systems that combine precision, stability, and operational efficiency for research and production environments alike.”
The RIE-800iPBC will be delivered alongside another Samco plasma etching system scheduled for installation at DTU Nanolab in 2026, further expanding the facility’s dry etch capabilities across multiple material platforms.
About DTU Nanolab
DTU Nanolab is the national nanofabrication facility of the Technical University of Denmark, providing cleanroom infrastructure and advanced processing tools for research in nanotechnology, microelectronics, photonics, and quantum devices. The facility supports both academic and industrial research projects and plays a central role in Denmark’s nanotechnology ecosystem. DTU Nanolab is also a member of EuroNanoLab, a consortium of more than 40 leading academic nanofabrication facilities across Europe that collaborate to strengthen pan-European research infrastructure and enable multi-national nano-fabrication projects. For more information, visit www.nanolab.dtu.dk and www.euronanolab.eu.
About Samco Inc.
Samco Inc. (TSE: 6387), short for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries. Founded in Kyoto, Japan in 1979 by Osamu Tsuji, Samco has nearly five decades of experience and has installed more than 5,000 systems worldwide. Samco’s equipment and thin-film technologies are widely adopted in the fabrication of semiconductor devices including SiC/GaN power and RF devices, GaAs VCSELs, InP laser diodes, MEMS, BAW/SAW filters, TSVs, advanced packaging, and emerging quantum and photonic devices. For more information, visit www.samcointl.com.
