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Slurry Partnership

Praxair and the HC Starck affiliate of Bayer AG have formed an alliance to develop, manufacture and supply colloidal silica slurries for the semiconductor chemical mechanical planarisation (CMP) market. The slurries will be marketed and sold globally by Praxair Electronics.
Praxair and the HC Starck affiliate of Bayer AG have formed an alliance to develop, manufacture and supply colloidal silica slurries for the semiconductor chemical mechanical planarisation (CMP) market. The slurries will be marketed and sold globally by Praxair Electronics.


Praxair has supplied polishing slurries for the hard-disk data storage and ophthalmic lens markets since 1985, with a manufacturing capacity of 8000 metric tons per year in Indiana. In addition to polishing slurries, Praxair produces polishing belts for the CMP market and operates a Class 10 CMP polishing lab to develop, test and customise slurries and polishing media for the semiconductor market.


Bayer was one of the first companies to develop and produce colloidal silica and it has been supplying colloidal silica under the brand name Levasil for more than 40 years. The annual production capacity of its Leverkusen facility in Germany achieves a five-figure metric ton output.


Bayer/HC Starck has developed a range of products for CMP that covers almost all polishing and planarisation steps in semiconductor manufacturing. In 1998, Bayer invested in a dedicated plant for production of CMP slurries with an annual capacity of 5000 metric tons.



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