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BOCE Gains Supercritical Order

BOC Edwards has been awarded a high-purity carbon dioxide supply contract from a major US semiconductor manufacturer for its supercritical CO2 process.
BOC Edwards has been awarded a high-purity carbon dioxide supply contract from a major US semiconductor manufacturer for its supercritical CO2 process.


Supercritical CO2 is an emerging wafer cleaning technology for manufacturing next-generation chips. The low viscosity and surface tension of the CO2 solvent allows for efficient cleaning of small feature sizes. It also has very low environmental impact compared with most existing cleaning methodologies.


Peter Thomas, vice president of marketing for the electronic materials group at BOC Edwards, reports: "BOC Edwards - through its relationship with Micell Integrated Systems - is committed to be the leader in this exciting new technology."



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