News Article
BOCE Gains Supercritical Order
BOC Edwards has been awarded a high-purity carbon dioxide supply contract from a major US semiconductor manufacturer for its supercritical CO2 process.
BOC Edwards has been awarded a high-purity carbon dioxide supply contract from a major US semiconductor manufacturer for its supercritical CO2 process.
Supercritical CO2 is an emerging wafer cleaning technology for manufacturing next-generation chips. The low viscosity and surface tension of the CO2 solvent allows for efficient cleaning of small feature sizes. It also has very low environmental impact compared with most existing cleaning methodologies.
Peter Thomas, vice president of marketing for the electronic materials group at BOC Edwards, reports: "BOC Edwards - through its relationship with Micell Integrated Systems - is committed to be the leader in this exciting new technology."

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Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.
2021 is no different. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. We shall consider a roadmap for this device, along with technologies for boosting its output.
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