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Sub-atmospheric Promotion

ATMI and Air Liquide announced an alliance to promote the productivity and safety benefits of SAGE gas packaging to the semiconductor industry.
ATMI and Air Liquide announced an alliance to promote the productivity and safety benefits of SAGE gas packaging to the semiconductor industry.


Air Liquide will integrate ATMI's sub-atmospheric gas packaging technology for CVD (chemical vapour deposition) processes. SAGE (Sub-Atmospheric Gas Enhanced) gas sources simplify the delivery of dopant gases to process tools, while optimising safety.


. Sub-atmospheric gas sources are recommended by the US National Fire Protection Association's NFPA 318 standard.



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Thanks to the great diversity of the semiconductor industry, we are always chasing new markets and developing a range of exciting technologies.

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