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Improving GaN Production

EMCORE claims that it will dramatically improve the economics of producing GaN materials through its GaN RealTemp 200 tool. Gallium nitride materials are used in the production of blue, green, and UV LEDs for use in cell phones and other backlighting applications.
EMCORE claims that it will dramatically improve the economics of producing GaN materials through its GaN RealTemp 200 tool. Gallium nitride materials are used in the production of blue, green, and UV LEDs for use in cell phones and other backlighting applications.


The system combines a high-speed infrared pyrometer and an LED-based reflectometer to measure target reflectivity and radiance. This method allows for real-time correction of emissivity during epitaxial deposition, giving reliable and repeatable temperature readings. The unit enables tuning of the reactor to ensure repeatable growth temperatures over a full series of production runs and a rapid return to production after maintenance.


Software enables analysis of growth rates and buffer layer and ternary material composition to improve quality and throughput levels on subsequent runs.


The original RealTemp system was designed to provide production-level in-situ temperature measurement for As/P applications. The RealTemp 200 is aimed at higher yield for GaN on sapphire or silicon carbide substrates device production and can be integrated into Emcore's GaNzilla tool. The company expects the new technology to be adaptable to all of the nearly 200 GaN systems deployed worldwide.


Early success had been achieved with a major LED producer that was selected as a beta test site. This manufacturer has ordered additional units for their existing systems.



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