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Tool To Back GaN On Si R&D

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The Electromagnetics Laboratory (ITHE) of the Rheinisch Westfaelische Technische Hochschule (RWTH) Aachen has ordered an Aixtron AIX 200/4 RF-S system to research gallium nitride on silicon applications.
The Electromagnetics Laboratory (ITHE) of the Rheinisch Westfaelische Technische Hochschule (RWTH) Aachen has ordered an Aixtron AIX 200/4 RF-S system to research gallium nitride on silicon applications.


The order is part of a joint research program supported by the German government between RWTH Aachen, Research Centre Juelich (FZJ) and Aixtron. The research will centre on high-power RF devices built on gallium nitride mainly grown on silicon wafers.


The deposition system will also include an in-situ surface temperature measurement tool - the EpiR-TT from LayTec - for precise growth monitoring.



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