Big Five Join 45nm IMEC Programme
IMEC's collaborative research programme targets technology generations two to three nodes ahead of state-of-the-art IC production. The central focus in these programmes is on advanced process module and device research, with several programmes being devoted to the exploration of new materials.
Programmes include advanced lithography, cleaning and contamination control, substrate modules (implementation of high-mobility layers and advanced source/drain engineering solutions), gate stack (high-k dielectrics and metal gates), alternative CMOS devices (SOI and multi-gate FETs), germanium-based CMOS devices and advanced interconnect solutions (ultra-low-k materials and wafer-level packaging on Cu damascene wires).
The tool set for the execution of these programmes will gradually transition from 200mm to 300mm wafers in IMEC's new research facility, which will be ready for equipment installation in Spring 2004. Partnerships with several leading equipment manufacturers have been concluded by the signing of agreements to deliver the latest process tools. A strategic alliance has been made with ASML to provide advanced lithography clusters.
Core partner benefits include increased involvement in the steering and execution of the research programmes, a favourable intellectual property ruling and an early insight to breakthrough research results. The partners also have access to all the programmes allowing them to obtain a full picture of the research status of sub-45nm technologies and to gain fundamental understanding in each area.
Other semiconductor companies such as Texas Instruments are also participating in a large number of programmes.
Professor Gilbert Declerck, president and CEO of IMEC, comments: "These agreements are proof of our ability to bring together the leading semiconductor manufacturers, material and equipment suppliers. We are confident that more key players will join us and further extend our programmes with worldwide competencies."
Dr Paolo Gargini, Intel's director of Technology Strategy and Intel Fellow, says: "We believe that IMEC is indeed one of the world's centres of excellence in its field. Intel has been an active participant in IMEC programmes for many years and has benefited as a result. We believe that the new 300mm cleanroom - hosting programmes aimed at features of 45nm and below - will further enhance the value of the contributions from IMEC. We now feel confident that we will get maximum value by becoming a core partner together with some of the leading IC companies in the world."
Joel Monnier, corporate vice president and director of Central R&D at STMicroelectronics, reports: "In conjunction with ST's well- established and long-term co-operation with its strategic research partner LETI, the Crolles2 Alliance partners will now have access to the most efficient advanced R&D in Europe and the US."
Crolles2 in France involves ST, Philips and Motorola with the Taiwan foundry TSMC also participating.
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