IMEC and Semilab collaborate on metrology
Semilab Co. Ltd., a manufacturer of materials metrology solutions to the semiconductor and solar industries, has announced that it will collaborate with IMEC, Europe’s independent nanoelectronics research institute, on the development of new metrology for semiconductor materials and photovoltaic processes.
IMEC and Semilab have signed a general multi-year and potentially multi-project frame agreement to facilitate the rapid implementation of future joint development projects. It is anticipated that the first of several new joint development projects (JDPs) will commence in the next month. The first JDP will target advanced characterization of high-K dielectrics and will be based around Semilab’s WT2000 automation platform installed with Semilab’s Junction Photovoltage and Charge-Voltage measurement technology. The development work will be executed by IMEC and Semilab staff resident in IMEC’s 300mm pilot line facility in Leuven.
“Last Year, Semilab in collaboration with IMEC staff completed an evaluation project which led to the filing of a jointly owned patent for a new application of Semilab’s Junction Photovoltage Measurement technology. Thanks to the expertise of the technical team at IMEC, Semilab is very confident that this frame agreement will result in further innovations from new JDPs in the near future”, said Dr. Tibor Pavelka, President and CEO of Semilab.
