News Article
Zeiss enters solar market
Carl Zeiss launches a new FIB-SEM with solar analysis capacity
Carl Zeiss SMT has introduced a newly developed FIB-SEM work station called the AURIGA CrossBeam. The company incorporated a huge number of innovations in the new AURIGA.
Dr. Thomas Albrecht, Director Product Management, said: “Useful information about a sample goes far beyond just high resolution surface images. We focused on two major tasks during the development of this powerful new instrument: First, to make possible the analysis of a never-before-seen variety of samples, and second, to enable customers to obtain the maximum information possible from each sample. AURIGA, delivering much more than just an image, is the result of this quest.”
The tool boasts a new chamber design and unique charge compensation system for advanced analytics, chemical analysis, crystallographic information, the complete morphology, electrical information; the number and complexity of tasks required to obtain an extensive sample characterization on the nanometre scale is unlimited, as is the number and variety of samples. Therefore, flexibility is a must. In order to meet this requirement, AURIGA has a completely redesigned vacuum chamber, which now includes a total of 15 ports for different detectors. Additionally, an unrivalled charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods benefit from this technology, supporting numerous applications in materials analysis, life sciences and semiconductor technology.
The charge compensation feature is currently unique to this tool and is the major reason why PV manufacturers will be so interested. Being able to analyze thin films with such clarity and without damaging or leaving electron residue will allow thin film solar manufacturers to analyze and improve their products in a manner that has not being possible before this launch.
The very heart of the AURIGA CrossBeam workstation is the proven GEMINI FE-SEM column. Its special in-lens EsB detector offers images with excellent material contrast. Additionally, the design of the GEMINI column enables the analysis of magnetic samples. A feature unique to CrossBeam workstations from Carl Zeiss is simultaneous milling and high-resolution SEM imaging. To ensure optimal customer support, AURIGA incorporates a new high-resolution FIB with a top level resolution of 2.5 nm and better. Advanced gas processing technology for ion and e-beam assisted etching and deposition completes the unequalled sample processing capabilities of this new instrument.
Zeiss has been clever in ensuring the new offering is completely modular based, allowing customers to choose their entry point in capability and cost. A research group may initially only want SEM capacity and the modular arrangement allows a company to buy in at this level and then add the necessary modular components as and when they require them. This will allow them to build towards the high end of the analysis range with FIB-SEM as the flexible adaptation to changing or growing demands is a requirement that is perfectly supported by AURIGA. Starting with a high-performance FE-SEM platform the system can be upgraded according to budgetary requirements or analytical needs to become a fully equipped CrossBeam workstation, including FIB column, gas injection system, charge compensation and an extensive variety of detectors. The AURIGA initially can be configured to meet today’s requirements while, at the same time, allow for upgradeability to meet future needs with leading-edge performance.
Dr. Thomas Albrecht, Director Product Management, said: “Useful information about a sample goes far beyond just high resolution surface images. We focused on two major tasks during the development of this powerful new instrument: First, to make possible the analysis of a never-before-seen variety of samples, and second, to enable customers to obtain the maximum information possible from each sample. AURIGA, delivering much more than just an image, is the result of this quest.”
The tool boasts a new chamber design and unique charge compensation system for advanced analytics, chemical analysis, crystallographic information, the complete morphology, electrical information; the number and complexity of tasks required to obtain an extensive sample characterization on the nanometre scale is unlimited, as is the number and variety of samples. Therefore, flexibility is a must. In order to meet this requirement, AURIGA has a completely redesigned vacuum chamber, which now includes a total of 15 ports for different detectors. Additionally, an unrivalled charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods benefit from this technology, supporting numerous applications in materials analysis, life sciences and semiconductor technology.
The charge compensation feature is currently unique to this tool and is the major reason why PV manufacturers will be so interested. Being able to analyze thin films with such clarity and without damaging or leaving electron residue will allow thin film solar manufacturers to analyze and improve their products in a manner that has not being possible before this launch.
The very heart of the AURIGA CrossBeam workstation is the proven GEMINI FE-SEM column. Its special in-lens EsB detector offers images with excellent material contrast. Additionally, the design of the GEMINI column enables the analysis of magnetic samples. A feature unique to CrossBeam workstations from Carl Zeiss is simultaneous milling and high-resolution SEM imaging. To ensure optimal customer support, AURIGA incorporates a new high-resolution FIB with a top level resolution of 2.5 nm and better. Advanced gas processing technology for ion and e-beam assisted etching and deposition completes the unequalled sample processing capabilities of this new instrument.
Zeiss has been clever in ensuring the new offering is completely modular based, allowing customers to choose their entry point in capability and cost. A research group may initially only want SEM capacity and the modular arrangement allows a company to buy in at this level and then add the necessary modular components as and when they require them. This will allow them to build towards the high end of the analysis range with FIB-SEM as the flexible adaptation to changing or growing demands is a requirement that is perfectly supported by AURIGA. Starting with a high-performance FE-SEM platform the system can be upgraded according to budgetary requirements or analytical needs to become a fully equipped CrossBeam workstation, including FIB column, gas injection system, charge compensation and an extensive variety of detectors. The AURIGA initially can be configured to meet today’s requirements while, at the same time, allow for upgradeability to meet future needs with leading-edge performance.
