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News Article

Double metrology acquisitions for Semilab

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Semilab expands metrology portfolio with acquisition of AMS and QC Solutions
Semilab has announced it has acquired Advanced Metrology Systems (AMS) and QC Solutions. The two Massachusetts-based metrology companies expand Semilab’s family of scalable, flexible solutions to help semiconductor and solar researchers and manufacturers characterize materials to reduce costs and increase yields.

“With these acquisitions, we are expanding our ability to provide a full set of metrology solutions to support basic material characterization in everything from R&D settings to fully automated production lines,” said Dr. Tibor Pavelka, one of the founders, now President and Chief Executive Officer of Semilab. “Semilab receives the benefit of their technologies and intellectual property (IP) and we can combine product lines to better meet the needs of our customers. We believe investing in the semiconductor market, even in these tough times will enable us to continue our nearly 20 years of growth and profitability and meet the metrology needs of the market presented by the drive to smaller nodes and new materials.”

AMS offers extendable, scalable metrology platforms and solutions for fast and detailed characterization of: 3D etched structures including high aspect ratio contacts and trenches; metal film thickness on product wafers; and high speed online mapping of low-k material properties. AMS’ award-winning products are installed in the fabs of top tier semiconductor manufacturers such as IBM and AMD. AMS will now become part of a Massachusetts division of Semilab known as Semilab AMS.

QC Solutions offers patented, non-contact, non-destructive systems for the fast, accurate and repeatable measurement of the electrical properties of epitaxial and implanted silicon wafers. QC Solutions will also become part of Semilab AMS.

“Semilab and AMS are well matched in terms of products and approach to customer engagement,” said Chris Moore, President and CEO Semilab AMS. “AMS’s success has come from delivering not products, but solutions designed to solve customer’s specific metrology challenges. I look forward to extending our success as part of Semilab and continuing to grow Semilab’s leadership in materials metrology.”

Both acquisitions were all cash transactions. QC Solutions and AMS are the latest metrology companies to be acquired by Semilab. In 2008 the company purchased the assets of French metrology equipment specialist SOPRA SA. In 2008 Semilab acquired a majority in SSM of Pittsburgh, PA, a provider of precision contact metrology and the Boxes Cross metrology technology from Applied Materials.

Shasta Partners, LLC advised Advanced Metrology Systems.

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