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News Article

DRIE win for STS

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STS wins DRIE tender at Fraunhofer ISIT

Surface Technology Systems plc (STS) has announced that theyhave received an order from Fraunhofer Institute for Silicon Technology ISITfor its market leading Pegasus system. This 200mm system will be used in a variety of projects within theresearch and development centre for Microelectronics and MicrosystemsTechnology which ISIT represents, providing research and production in onelocation.

Fraunhofer ISIT, based in Itzehoe, Germanydevelops and manufactures components in microelectronics and microsystemstechnology, from the design phase – including system simulation – toprototyping and fabrication of samples, up to series production for a widerange of applications such as medical care, environmental and trafficengineering, communication systems, automotive industry, and mechanicalengineering. Working under contract, ISIT develops devices in accordance withcustomer requirements including full system integration using miniaturizedassembly and interconnection technology. Together with Vishay Siliconix ItzehoeGmbH, the institute operates a professional semiconductor production line whichis up-to-date in all required quality certifications (e. g. ISO 9001, TS16949). This line is used in parallel for PowerMOS and microsystem productionand for R&D projects developing new devices and technological processes.

“We deal with a large variety of customers, creating a highdemand for our deep silicon etch technology,” said Christian Schroeder ofFraunhofer ISIT. “The Pegasus system from STS is by far the most flexible toolto satisfy these varied and highly challenging specifications. In addition toprocess flexibility, we also require high etch rates with good uniformity andprofile control for typical MEMS structures, and very fine CD control andsmooth sidewalls for semiconductor and TSV applications. We are convinced thatthe Pegasus system delivers the best process capability available on the marketplace today”.

Eizo Yasui, CEO of STS replied, “Winning this order at aleading European facility, with exposure to a large number of users, is importantfor us.  We are confident our Pegasus provides the ideal combination offlexibility and market-leading process capabilities on a production-provensystem, to enable Fraunhofer ISIT and their clients to transfer their owninnovations into new business successes.”


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