Brooks to provide memstar
memsstar has announced that it has selected Brooks Automation as its supplier of choice for advanced automated wafer handling systems. The Marathon Express family of advanced vacuum wafer handling platforms will be the backbone of the latest generation of memsstar vapour release process tools targeted for the micro-electromechanical systems (MEMS) market.
Tony McKie general manager for memsstar, commented, "We have chosen the Brooks Marathon Express system to offer our customer base a true production worthy product, which offers great flexibility for 100 to 200mm wafers.
This coupled with Brooks' renowned service and support has enabled a very quick time to market and offers our customers the benefit of a world class service and support structure."
Clint Haris, Vice President of Brooks Automation, added, "We are delighted to be able to partner with memsstar and to be able to deliver automation systems and services throughout the complete product life cycle. Brooks' automation solutions are well suited to the unique needs of the growing market for MEMS accelerometers, microphones and gyroscopes."
