News Article
FSI International secures multiple orders
FSI International Inc has announced that a leading Asia-based logic device producer has placed additional orders for multiple ANTARES CryoKinetic cleaning systems, further broadening the platform's installed base.
The logic chip provider currently uses the ANTARES system for various BEOL particle removal processes and with this order, is adding capacity in the 45nm technology generation at their U.S. fab. The systems are expected to ship in the second quarter of fiscal 2011. The dual process chamber ANTARES systems range in price from $1.8 to $2.3 million, depending on configuration.
