News Article
SEMATECH appoints Stefan Wurm Director Of Lithography
SEMATECH announced that noted industry technologist Dr. Stefan Wurm has been named director of Lithography. The SEMATECH Lithography program is a key enabler of worldwide EUV infrastructure development, and Dr. Wurm will be responsible for assuring that SEMATECH's strategic direction and its execution support critical lithography technology areas.
As a GLOBALFOUNDRIES assignee, Dr. Wurm has most recently served as SEMATECH's associate director of Lithography and has more than 20 years of industry and research and development experience. In the late 1990s, he joined SEMATECH's International 300 mm Initiative (I300I), where he was responsible for 300 mm metrology tool equipment demonstrations. Prior to being appointed associate director in 2008, he served four years as SEMATECH's extreme ultraviolet (EUV) program manager, where he was instrumental in shaping and directing the SEMATECH EUV program. He is a principal member of technical staff at GLOBALFOUNDRIES Technology Development Group and has held technical and management positions in technology development at Advanced Micro Devices, Siemens Semiconductor Group, Infineon, and Qimonda.
Dr. Wurm holds a doctorate in physics and natural sciences from the Technische Universität Muenchen, Germany. He holds more than ten U.S. and non-U.S. patents and is the author of multiple publications covering lithography, fundamental research, and semiconductor technology and manufacturing.
