Axcelis Wins Follow-on Order From Major Chipmaker
Axcelis Technologies, Inc, a supplier of solutions for the
semiconductor industry, has announced that one of the world's leading
semiconductor manufacturers has placed follow-on orders for Integra RS plasma dry strip systems. The systems will
be used in high volume production for logic and image sensor devices at two of
the chipmaker's new, leading edge fabs.
The systems began shipping in November 2011.
"We look forward to building on our relationship with
this customer in the plasma dry strip segment as they expand their
manufacturing operations," said Mary Puma, chairman and CEO. "As devices become more complex, plasma
cleaning processes are becoming increasingly critical in a greater percentage
of the process flow in order to achieve performance and yield goals. The
Integra tools address these new requirements with enabling process technology
on a versatile, single-wafer platform. Unlike competitive systems, the Integra
RS delivers a wide range of processes without compromising productivity "“
through a unique, modular design that provides unprecedented manufacturing
flexibility and speed."
