News Article
Oxford Instruments Impress Lancaster University
The Lancaster Quantum Technology Centre (LQTC) will use the tools for nano-patterning of antimonides and nitrides for mid-infrared light sources and detectors. They will also be used for solar cells and quantum dot memories development
As part of its strategy for the development of physical sciences, the PlasmaPro NGP80 and PlasmaPro System100 ICP Etch systems were chosen for their flexibility; they will enable many applications that the multi-user LQTC wishes to run in its cleanrooms.
Oxford Instruments says LQTC chose its systems as it has an extensive process library of over 6,000 recipes and provides excellent customer support, service and training packages.
Head of the Semiconductor Physics & Nanostructures Research Group at Lancaster University, Tony Krier, comments, "These new Oxford Instruments etch tools will enable us to run dry plasma etching and nano-patterning on a range of semiconductors including narrow gap antimonides and dilute nitrides for mid-infrared light sources and detectors. They will also be used for development of novel solar cells, quantum dot memories, nano-electronic structures, and much more."
Krier continues, "The new clean room facility provides a focus for industrial and academic researchers with interests in fabricating nanoscale structures to enable them to investigate quantum phenomena. We chose Oxford Instruments because of the excellent technical specification and well founded reputation of the processing tools backed up by expert specialist support."
"Oxford Instruments was founded as a result of the pull-through of science into the marketplace, and we are delighted to be part of this significant development in UK scientific research capabilities", says Mark Vosloo, Sales & Customer Support Director at Oxford Instruments Plasma Technology, "Like the LQTC, Oxford Instruments uses innovation to turn smart science into world class products, meeting the needs of the 21st century and beyond."
